The POU3500 program offers dynamic temperature control of the method chamber cathode / electrode / anode and may be synchronized with any etch approach.
30% of its peak electrical power usage, supplying our shoppers substantial reduction in functioning charges and elevated dependability.
the knowledge under is categorized by semiconductor course of action and Software maker. Every desk contains an apps Matrix that demonstrates qulified and business procedures.
initially Started in 1985, our company has grown into a acknowledged chief in supplying temperature Regulate programs to the worldwide semiconductor marketplace.
LAUDA-Noah will, to get a customer's retrofit evaluation, keep track of and change its fluid temperature Regulate profiles to match an present TCUs' so as to guarantee a smooth method integration by way of DAQ.
We are guided inside our belief that prosperity During this competitive market stems from giving consumers with highly engineered new solutions and entire world course customer care.
The accuracy on the POU 3500 allows for impartial control of the process fluid temperature into the wafer chuck in +/- 0.one °C of set level, plus the fast reaction time in the method allows for maximum wafer-to-wafer repeatability through the entire etch approach.
Together with the POU3300, you are able to realize unprecedented leads to etch general performance, chamber uptime, reduced cost of possession and fab Area utilization – all while strengthening your process trustworthiness.
Large Footprint: Static models occupy considerable Area inside the fabrication Software place, minimizing its performance.
LAUDA-Noah is Assembly these new issues and it has integrated Electricity saving technological know-how in techniques that happen to be welcoming to your ecosystem and also have a affordable to function.
the info established Here's from a 200mm volume production wafer fab and clearly illustrates the advantage of the LAUDA-Noah POU system.
More than ever, shrinking gadget geometries, demanding new processes and a highly competitive ecosystem involve temperature Regulate programs that Incorporate rapidly and accurate temperature Manage using an emphasis on minimized running costs and enhanced dependability.
Confirmed; TEs' depict only one Component of a chiller's design. The switching & Command approaches employed by a chiller will affect the TEs' reliability.
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